Success Case | Getech OHT Overhead Hoist Transport Solution, Building Top Domestic Self-developed Semiconductor Wafer Handling System
An important high-end core electronic device supply base and semiconductor new device and new technology innovation base in China, to improve wafer handling efficiency and support the stable and efficient operation of semiconductor production lines, decided to build the most advanced domestic self-developed wafer handling system in the semiconductor field with independent intellectual property rights, high efficiency, stability, and high intelligence.
Based on the construction planning and current situation of the base, Getech conducted detailed scheme design from three aspects: production efficiency improvement, data security, and compact space design, providing overall solutions such as aerial material transmission, human-machine collaboration, and data transmission:
Production Efficiency Improvement
Through overhead hoist deployment and installation, covering material handling between multiple machines' complex process flows, and using MCS for full-process automatic material handling, it compensates for traditional manual handling's shortcomings in efficiency, error rate, cleanliness, etc.
Data Security
Provide customized network security solutions for customer scenarios, ensuring the stability, feasibility, and security of overhead hoist operation data and data transmission.
Compact Space Design
The system solution includes self-developed OHT, OHTC, MCS, special-shaped tracks, etc. The entire AMHS system includes numerous hardware equipment and software for handling, communication, storage, etc., covering the entire semiconductor front-end process, fully considering customer's material handling needs in compact spaces as an overall solution.
By building a complete wafer handling system, Getech has helped customers achieve significant results in space and equipment utilization, transportation safety and efficiency, production scheduling flexibility, etc.:
1、Provide customers with ceiling-mounted tracks, adopt multi-layer design OHB structure, fully consider the coordination between transmission paths of different processes in the customer's factory, optimize overhead hoist transmission paths, and improve the customer's overall space utilization rate and equipment usage efficiency.
2、Greatly reduce the risk of wafer damage caused by handling vibrations during the wafer handling process, control handling accuracy within ±1mm, ensure carrier vibration value during handling is <0.5G, implement multiple protections in key pick-and-place processes, and ensure timely, stable, and safe transportation of production materials.
3、Effectively integrate data from software transmission layers such as MES, EAP, OHTC, OHT, fully consider the optimal path for material transportation in the production process, effectively avoid congestion, and closely collaborate with other FAB equipment and software. Through digital twin technology, achieve effective tracking of whole-plant handling, provide managers with reliable, real-time data information, and enhance the flexibility and response speed of production scheduling.
