GETECH New Generation N2 Purge Stocker Aids Semiconductor High-Cleanliness Storage, Builds Domestic Storage Lifeline
As is well known, in semiconductor manufacturing, wafers undergo dozens of process steps from lithography to packaging, and environmental fluctuations during each storage and handling directly affect yield. Therefore, building a storage environment with "high cleanliness, low oxygen, low humidity, low vibration" has become a core rigid demand for advanced production lines to ensure yield—and theN2 Purge Stocker is the core equipment to achieve this goal.
However, traditionalN2 Purge Stocker has the following pain points and bottlenecks:
Cleanliness loss of control: Conventional storage难以维持百级（Class 100) ultra-clean environment, nitrogen concentration fluctuations cause wafer surface oxidation;
Manual intervention risk: Manual scanning/handling introduces particle contamination, error rate up to0.5%;
Energy efficiency bottleneck: Traditional nitrogen filling scheme nitrogen loss over30%;
Material damage risk: Wafers are prone to cracking or displacement due to vibration during transport.
As a leading industrial intelligence enterprise, GETECH practices theAI+CIM+AMHS" overall solution in the semiconductor field, helping semiconductor factories upgrade intelligently. Since2024年启动AMHS业务以来，格创东智持续深耕以OHToverhead transport vehicles (sky vehicles),
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